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DIN Standards Committee Materials Testing

Abstract

This document specifies the process for determining the optical or dielectric constants by means of ellipsometric measurements and their analysis based on the bulk material model. If the assumptions of the bulk material model are strictly met, it is possible to determine the optical constants (refractive index n and extinction coefficient k) or the dielectric constants (real part ε1 and imaginary part ε2) of the material directly. Alternatively, optical ( and ) or dielectric (<ε1> and <ε2>) pseudo constants are determined, which depend on the measurement angle of incidence φ. The degree of consistency of the pseudo constants in the relevant spectral range, determined from measurements at different angles of incidence, represents a necessary prerequisite for the validity or quality of the bulk material model.

Begin

2026-08-25

WI

00262397

Planned document number

DIN EN ISO 23131-2

Project number

06237166

Responsible national committee

NA 062-02-101 AA - Measuring and test methods for coatings and coating systems  

Responsible european committee

CEN/TC 262/WG 12 - Maintenance and ISO co-ordination  

Responsible international committee

ISO/TC 107/JWG 4 - Joint ISO/TC 107 - ISO/TC 35/SC 9 WG: Thickness measurement methods for coatings, paints and varnishes  

previous edition(s)

Ellipsometry - Part 2: Bulk material model; Text in German and English
2021-04