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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50455-1
Testing of materials for semiconductor technology; methods for characterizing photoresists; determination of coating thickness with optical methods

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Verfahren zur Charakterisierung von Fotolacken; Bestimmung der Schichtdicke mit optischen Meßmethoden