NA 062
DIN Standards Committee Materials Testing
Draft standard
[Withdrawn]
ISO/DIS 13083
ISO/DIS 13083
Surface chemical analysis - Scanning Probe Microscopy- Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy
Title (German)
Chemische Oberflächenanalyse - Rastersondenmikroskopie - Standards zur Definition und Kalibrierung der räumlichen Auflösung von Rasterausbreitungswiderstandsmikroskopie und Rasterkapazitätsmikroskopie
Responsible national committee
NA 062-09-103 AA - Surface chemical analysis and scanning probe microscopy
