NA 062
DIN Standards Committee Materials Testing
Standards
[Withdrawn]
DIN 50451-1
DIN 50451-1
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 1: Silver (Ag), gold (Au), calcium (Ca), copper (Cu), iron (Fe), potassium (K) and sodium (Na) in nitric acid by AAS
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 1: Silber (Ag), Gold (Au), Calcium (Ca), Kupfer (Cu), Eisen (Fe), Kalium (K) und Natrium (Na) in Salpetersäure mittels AAS
Document: references other documents
Responsible national committee
NA 062-10-103 AA - Testing of process materials for semiconductor technology
