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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 8181
Atomic layer deposition - Vocabulary

Title (German)

Atomlagenabscheidung - Terminologie

Responsible national committee

NA 062-01-64 AA - Carbon-based films and ceramic hard coatings  

Responsible international committee

ISO/TC 107/WG 5 - Atomic layer deposition  

Edition 2023-10
Original language English
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Table of contents

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