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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50438-1
Testing of materials for semiconductor technology - Determination of impurity content in silicon by infrared absorption - Part 1: Oxygen

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung des Verunreinigungsgehaltes in Silicium mittels Infrarot-Absorption - Teil 1: Sauerstoff

Document: references other documents

Responsible national committee

NA 062 - DIN Standards Committee Materials Testing  

Edition 1994-09
Original language German
Price from 56.60 €
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Table of contents

Contact

Dipl.-Ing.

Michaela Treige

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2224
Fax: +49 30 2601-42224

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