DIN Standards Committee Materials Testing
ISO 18516
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung
Responsible national committee
NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy