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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50446
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Defektarten und Defektdichten in Silicium-Epitaxieschichten

Document: references other documents

Responsible national committee

NA 062 BR - Board of DIN Standards Committee for Materials Testing  

Edition 1995-09
Original language German
Price from 56.60 €
Order from Beuth Verlag
Table of contents

Contact

Dipl.-Ing.

Jan Henrik Krafft

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2937
Fax: +49 30 2601-42937

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