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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN 50450-4
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C₁-C₃-hydrocarbons in nitrogen by gas-chromatography

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von C₁-C₃-Kohlenwasserstoffen in Stickstoff mit Gaschromatographie

Responsible national committee

NA 062-05-73 AA - Gas analysis and gas quality  

Edition 1993-09
Original language German
Price from 34.60 €
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Table of contents

Contact

Dipl.-Ing.

Florian Rieger

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2598
Fax: +49 30 2601-42598

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