NA 062
DIN Standards Committee Materials Testing
Standards
[Withdrawn]
DIN 50445
DIN 50445
Testing of materials for semiconductor technology; contactless determination of the electrical resistivity of semiconductor slices with the eddy current method; homogeneously doped semiconductor wafers
Title (German)
Prüfung von Materialien für die Halbleitertechnologie; Kontaktlose Messung des spezifischen elektrischen Widerstandes mit dem Wirbelstrom-Verfahren; Homogen dotierte Halbleiterscheiben
Document: references other documents
Document: referenced in other documents
Responsible national committee
NA 062 BR - Board of DIN Standards Committee for Materials Testing