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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN 50455-2
Testing of materials for semiconductor technology - Methods for the characterisation photoresists - Part 2: Determination of photosensitivity of positive photoresists

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Charakterisierung von Fotolacken - Teil 2: Bestimmung der Lichtempfindlichkeit von Positiv-Fotolacken

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 1999-11
Original language German
Price from 34.60 €
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