NA 062
DIN Standards Committee Materials Testing
Standards
[CURRENT]
DIN 50455-2
DIN 50455-2
Testing of materials for semiconductor technology - Methods for the characterisation photoresists - Part 2: Determination of photosensitivity of positive photoresists
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Charakterisierung von Fotolacken - Teil 2: Bestimmung der Lichtempfindlichkeit von Positiv-Fotolacken
Document: references other documents
Responsible national committee
NA 062-10-103 AA - Testing of process materials for semiconductor technology
