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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50453-2
Testing of materials for semiconductor technology; determination of etch rates of etching mixtures; silicium-dioxid coating; optical method

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung der Ätzrate von Ätzmischungen; Siliciumdioxid-Schichten; Optisches Verfahren

Document: references other documents

Responsible national committee

NA 062-10-103 AA - Testing of process materials for semiconductor technology  

Edition 1990-10
Original language German
Price from 36.70 €
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