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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50453-1
Testing of materials for semiconductor technology; determination of etch rates of etching mixtures; silicium monocrystals; gravimetric method

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung der Ätzraten von Ätzmischungen; Silicium-Einkristalle; Gravimetrisches Verfahren

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology

Edition 1990-10

Original language German

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Terminology

DIN Standards Committee Materials Testing

DIN 50453-1 Testing of materials for semiconductor technology; determination of etch rates of etching mixtures; silicium monocrystals; gravimetric method

Responsible national committee

Denise Winter

DIN 50453-1
Testing of materials for semiconductor technology; determination of etch rates of etching mixtures; silicium monocrystals; gravimetric method