NA 062
DIN Standards Committee Materials Testing
Project
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 9: Determination of XX elements in hydrogen peroxide by ICP-MS
Abstract
This document specifies a method for the determination of the elements XX in hydrogen peroxide in the trace range, the determination method being mass spectrometry with inductively coupled plasma as ion source (ICP MS, en: inductively coupled plasma mass spectrometry) is used.
Begin
2025-12-09
Planned document number
DIN 50451-9
Project number
06236919
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
