2. Getting involved
  3. Standards Committees
  4. NMP
NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees
Draft standard

ISO/DIS 25164
Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification

Title (German)

Physikalische Gasphasenabscheidung – Magnetron-Sputter-Abscheidung von TiAlSiN-Dünnschichten – Spezifikation

Responsible national committee

NA 062-02-103 AA - Carbon-based films and ceramic hard coatings  

Responsible international committee

ISO/TC 107/SC 9 - Physical vapor deposition coatings  

Edition 2025-10
Original language English
Price from 76.70 €
Order from DIN Media
Table of contents

Contact

Clemens Judersleben

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2210
Fax: +49 30 2601-42210

Send message to contact