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NA 062

DIN Standards Committee Materials Testing

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Draft standard

ISO/DIS 4508
Surface chemical analysis - Scanning probe microscopy - Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements

Title (German)

Chemische Oberflächenanalyse - Rastersondenmikroskopie - Leitfaden für das Verfahren und die Vorgehensweise zur Bestimmung der Temperatureffekte auf AFM-Dimensionalmessungen

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 9/WG 8 - Effects of temperature on dimensional AFM measurements  

Edition 2025-02
Original language English
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