DIN Standards Committee Materials Testing
DIN SPEC 1994
Testing of materials for semiconductor technology - Determination of anions in weak acids
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Anionen in schwachen Säuren
Procedure
Technical Report
Overview
This Technical Report has been prepared by Working Committee NA 062-02-21 AA "Prüfung von Prozesschemikalien für die Halbleitertechnologie" ("Testing of process materials for semiconductor technology") at DIN standards committee. This technical report specifies a method for the determination of the anions chloride, sulfate, nitrate and phosphate in hydrofluoric acid, ammonium fluoride solution and their mixtures as well as in acetic acid in the range from 10 ng/g to 1 000 ng/g. The working range is limited by the capacity of the enrichment columns and by that of the separation column. Sample dilution into the working range may be necessary. After prior testing, the method can also be applied to the matrices formic acid, glycolic acid, and other weak acids.
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
