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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50451-1
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 1: Silver (Ag), gold (Au), calcium (Ca), copper (Cu), iron (Fe), potassium (K) and sodium (Na) in nitric acid by AAS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 1: Silber (Ag), Gold (Au), Calcium (Ca), Kupfer (Cu), Eisen (Fe), Kalium (K) und Natrium (Na) in Salpetersäure mittels AAS

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2003-04
Original language German
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