NA 062
DIN Standards Committee Materials Testing
Standards
[Withdrawn]
DIN 50446
DIN 50446
Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Defektarten und Defektdichten in Silicium-Epitaxieschichten
Document: references other documents
Responsible national committee
NA 062 BR - Board of DIN Standards Committee for Materials Testing