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NA 062

DIN Standards Committee Materials Testing

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ISO/TC 202
Microbeam analysis

Publications Projects

Standardization in the field of microbeam analysis (measurement, parameters, methods and reference materials) which uses electrons as an incident beam and electrons and photons as the detection signal.

Note:

The purpose is to analyze the compositional and structural characteristics of solid materials. The volume of analysis will generally involve a depth up to 10 micrometers and a surface area less than 100 square micrometers.

National mirror committee of ISO/TC 202

Committee ID Name
NA 062-08-18 AA Electron microscopy and microbeam analysis