Projects of ISO/TC 107/JWG 4

Document number Begin Title Comment
DIN EN ISO 23131-1 2026-09-23 Ellipsometry - Part 1: Principles More  Comment 
ISO/AWI 23131-1 2026-09-12 Ellipsometry - Part 1: Principles More  Comment 
DIN EN ISO 23131-2 2026-08-25 Ellipsometry - Part 2: Bulk material model (ISO 23131-2:2026); German and English version prEN ISO 23131-2:2026 More  Comment 
DIN EN ISO 23131-3 2026-08-25 Ellipsometry - Part 3: Transparent single layer model (ISO 23131-3:2026); German and English version prEN ISO 23131-3:2026 More  Comment 
ISO/AWI 23131-4 2026-08-19 Ellipsometry - Part 4: Semi-transparent single layer model More  Comment 
DIN EN ISO 26273 2026-06-30 Non-metallic coatings - Measurement of thickness - Terahertz method More  Comment 
ISO/CD 26273 2026-01-06 Non-metallic coatings--Measurement of thickness--Terahertz method More  Comment 

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