Ellipsometry - Part 1: Principles
Begin
2026-09-23
WI
00262398
Planned document number
DIN EN ISO 23131-1
Project number
06237170
Responsible national committee
NA 062-02-101 AA - Measuring and test methods for coatings and coating systems
Responsible european committee
CEN/TC 262/WG 12 - Maintenance and ISO co-ordination