Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Begin

2026-08-25

WI

00262396

Planned document number

DIN EN ISO 23131-3

Project number

06237167

Responsible national committee

NA 062-02-101 AA - Measuring and test methods for coatings and coating systems  

Responsible european committee

CEN/TC 262/WG 12 - Maintenance and ISO co-ordination  

Responsible international committee

ISO/TC 107/JWG 4 - Joint ISO/TC 107 - ISO/TC 35/SC 9 WG: Thickness measurement methods for coatings, paints and varnishes  

previous edition(s)

Ellipsometry - Part 3: Transparent single layer model; Text in German and English
2022-04

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