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NA 062

DIN Standards Committee Materials Testing

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Draft standard

ISO/DIS 19383
Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors

Title (German)

Atomlagenabscheidung - Chemische Eigenschaften von Vorläufersubstanzen für die Atomlagenabscheidung und damit zusammenhängende Verfahrensspezifikationen

Responsible national committee

NA 062-01-61 AA - Measuring and test methods for coatings and coating systems  

Responsible international committee

ISO/TC 107/WG 5 - Atomic layer deposition  

Edition 2025-05
Original language English
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Table of contents

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