DIN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026); German version EN ISO 14644-14:2026
Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft (ISO 14644-14:2026); Deutsche Fassung EN ISO 14644-14:2026
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible european committee
CEN/TC 243 - Cleanroom technology
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments