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Standards [CURRENT]

ISO 21859
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

Title (German)

Hochleistungskeramik - Prüfverfahren für die Plasmabeständigkeit keramischer Bauteile in Halbleiterfertigungsanlagen

Responsible national committee

NA 062-08-113 AA - Advanced ceramics; terminology and testing methods  

Responsible international committee

ISO/TC 206/WG 12 - Engineering applications and porous ceramics  

Edition 2019-06
Original language English
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Table of contents

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