NA 027
DIN Standards Committee Optics and Precision Mechanics
DIN 32567-5 [CURRENT] references following documents:
| Document number | Edition | Title |
|---|---|---|
| DIN 32564-1 | 2004-05 | Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology More |
| DIN 32567-1 | 2015-06 | Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences More |
| VDI/VDE 2655 Blatt 1.2 | 2010-10 | Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement More |
