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NA 027

DIN Standards Committee Optics and Precision Mechanics

About NAFuO Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Title (German)

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems

Edition 2007-12

Original language German

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Table of contents

PDF (DE)

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Terminology

DIN Standards Committee Optics and Precision Mechanics

DIN 32566 Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Document: references other documents

Responsible national committee

Clara Engesser

DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring