NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Standards
[Withdrawn]
DIN IEC/IEEE 62659
DIN IEC/IEEE 62659
Nanomanufacturing - Large scale manufacturing for nanoelectronics (IEC/IEEE 62659:2015)
Title (German)
Nanofertigung - Großtechnische Produktion von Nanoelektronik (IEC/IEEE 62659:2015)