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NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

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Pre-standard

IEC/TS 62622
Nanotechnologies - Description, and measurement of dimensional quality parameters of artificial gratings

Title (German)

In der Nanotechnologie verwendetet künstliche Gitter - Beschreibung und Messung dimensionaler Qualitätsparameter

Responsible national committee

DKE/K 141 - Nanotechnologie  

Edition 2012-10
Original language English
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Table of contents

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