Norm [AKTUELL]

BS IEC 62047-46
Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Titel (englisch)

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Ausgabe 2025-04-30
Originalsprache Englisch
Preis ab 203,00 €
Kaufen bei DIN Media
Inhaltsverzeichnis