Norm-Entwurf

23/30454370 DC
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices. Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane

Titel (englisch)

BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices. Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane

Ausgabe 2023-04-19
Originalsprache Englisch
Preis ab 25,70 €
Kaufen bei DIN Media
Inhaltsverzeichnis