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Project

Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification

Begin

2024-06-13

Planned document number

ISO/DIS 25164

Responsible national committee

NA 062-01-64 AA - Carbon-based films and ceramic hard coatings  

Responsible international committee

ISO/TC 107/SC 9 - Physical vapor deposition coatings  

draft standard

Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification
2025-10
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Contact

Clemens Judersleben

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10787 Berlin

Tel.: +49 30 2601-2210
Fax: +49 30 2601-42210

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