Standards
[New]
ISO 25164
ISO 25164
Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification
Title (German)
Physikalische Gasphasenabscheidung – Magnetron-Sputter-Abscheidung von TiAlSiN-Dünnschichten – Spezifikation
Responsible national committee
NA 062-02-103 AA - Carbon-based films and ceramic hard coatings