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Technical rule [CURRENT]

ISO/TR 19319
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Title (German)

Chemische Oberflächenanalyse - Grundlegende Ansätze zur Bestimmung der lateralen Auflösung und Schärfe von strahlenbasierten Verfahren

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy

Responsible international committee

ISO/TC 201/SC 2 - General procedures

Edition 2013-03

Original language English

Price from 239.00 €

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Table of contents

PDF (EN)

Contact

Steffen Jenkel

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10787 Berlin

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