Publications of NA 041-02-21 AA

ISO 14644-10 2022-05 Standards Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination More  Order from DIN Media
ISO 14644-12 2018-08 Standards Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration More  Order from DIN Media
ISO 14644-13 2026-02 Standards Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration More  Order from DIN Media
ISO 14644-14 2026-02 Standards Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration More  Order from DIN Media
ISO 14644-15 2026-05 Standards Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration More  Order from DIN Media
ISO 14644-16 2019-05 Standards Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices More  Order from DIN Media
ISO 14644-17 2021-02 Standards Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications More  Order from DIN Media
ISO 14644-18 2023-10 Standards Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables More  Order from DIN Media
ISO/TR 14644-21 2023-08 Technical rule Cleanrooms and associated controlled environments - Part 21: Airborne particle sampling techniques More  Order from DIN Media

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