Publications of NA 022

DIN EN 62047-17 2015-12 Standards Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (IEC 62047-17:2015); German version EN 62047-17:2015 More  Order from DIN Media
DIN EN 62047-18 2014-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials (IEC 62047-18:2013); German version EN 62047-18:2013 More  Order from DIN Media
DIN EN 62047-19 2014-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses (IEC 62047-19:2013); German version EN 62047-19:2013 More  Order from DIN Media
DIN EN 62047-20 2015-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014); German version EN 62047-20:2014 More  Order from DIN Media
DIN EN 62047-21 2015-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014 More  Order from DIN Media
DIN EN 62047-22 2015-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (IEC 62047-22:2014); German version EN 62047-22:2014 More  Order from DIN Media
DIN EN 62047-25 2017-04 Standards Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (IEC 62047-25:2016); German version EN 62047-25:2016 More  Order from DIN Media
DIN EN 62047-26 2016-12 Standards Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016); German version EN 62047-26:2016 More  Order from DIN Media
DIN EN 62052-21 ; VDE 0418-2-21:2017-10 2017-10 Standards Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 21: Tariff and load control equipment (IEC 62052-21:2004 + A1:2016); German version EN 62052-21:2004 + A1:2017 More  Order from DIN Media
DIN EN 62053-11 ; VDE 0418-3-11:2017-08 2017-08 Standards Electricity metering equipment (a.c.) - Particular requirements - Part 11: Electromechanical meters for active energy (classes 0,5, 1 and 2) (IEC 62053-11:2003 + A1:2016); German version EN 62053-11:2003 + A1:2017 More  Order from DIN Media

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