Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06)
Edition 2021-03-24

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2022)
Edition 2023-11-15

Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
Edition 2005-03-16

Cleanrooms and associated controlled environments. Part 7: Separative enclosures (clean air hoods, gloveboxes, isolators, mini-environments) (ISO 14644-7:2004)
Edition 2005-06-08

Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)
Edition 2023-02-08

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
Edition 2022-11-30

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Edition 2022-11-30

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)
Edition 2018-12-19

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
Edition 2017-07-12

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
Edition 2018-12-19