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NA 152

DIN Standards Committee Technical Fundamentals

About NATG Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.2
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

Title (German)

Optische Messtechnik an Mikrotopografien - Kalibrieren von konfokalen Mikroskopen und Tiefeneinstellnormalen für die Rauheitsmessung

Edition 2010-10

Original language German , English

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Table of contents

PDF (DE,EN)

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Terminology

DIN Standards Committee Technical Fundamentals

VDI/VDE 2655 Blatt 1.2 Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

VDI/VDE 2655 Blatt 1.2
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement