DIN Standards Committee for Organizational Processes
DIN EN IEC 62276
Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (IEC 62276:2025); German version EN IEC 62276:2025
Einkristall-Wafer für Oberflächenwellen-(OFW-)Bauelemente - Festlegungen und Messverfahren (IEC 62276:2025); Deutsche Fassung EN IEC 62276:2025
Overview
This document applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators. This document applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators. The standard differs from DIN EN 62276:2017-08 as follows: a) the terms and definitions, the technical requirements, sampling frequency, test methods and measurement of transmittance, lightness, colour difference for LN and LT have been added in order to meet the needs of industry development; b) the term "inclusion" (mentioned in 4.13 and 6.10) and its definition have been added because there was no definition for it in Clause 3; c) the specification of LTV and PLTV, and the corresponding description of sampling frequency for LN and LT have been added, because they are the key performance parameters for the wafers; d) the tolerance of Curie temperature specification for LN and LT have been added in order to meet the development requirements of the industry; e) measurement of thickness, TV5, TTV, LTV and PLTV have been completed, including measurement principle and method of thickness, TV5, TTV, LTV and PLTV. Application of this document increases investment security for manufacturers and users, provides testing laboratories and manufacturers with defined information for testing, and enhances product compatibility between manufacturers.
Responsible national committee
DKE/K 642 - Piezoelektrische Bauteile zur Frequenzstabilisierung und -selektion