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NA 027

DIN Standards Committee Optics and Precision Mechanics

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Standards [CURRENT]

DIN 32564-2
Production equipment for micro-systems - Terms and definitions - Part 2: Basic technologies and production

Title (German)

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 2: Basistechnologien und Herstellung

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems  

Edition 2004-05
Original language German
Price from 43.40 €
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M.Sc.

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