NA 027
DIN Standards Committee Optics and Precision Mechanics
DIN 32567-3 [Withdrawn] references following documents:
| Document number | Edition | Title |
|---|---|---|
| DIN EN ISO 5436-1 | 2000-11 | Geometrical Product Specifications (GPS) - Surface texture: Profile method; Measurement standards - Part 1: Material measures (ISO 5436-1:2000); German version EN ISO 5436-1:2000 More |
| DIN 32564-1 | 2004-05 | Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology More |
| DIN 32567-2 | 2014-10 | Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures More |
| VDI/VDE 2617 Blatt 12.1 | 2011-03 | Accuracy of coordinate measuring machines - Characteristics and their checking - Acceptance and reverification tests for tactile CMM measuring microgeometries More |
| VDI/VDE 2629 Blatt 1 | 2008-08 | Accuracy of contour-measuring systems - Characteristics and checking of characteristics - Acceptance testing and reverification testing of contour-measuring systems according to the tactile stylus method More |
| VDI/VDE 2655 Blatt 1.2 | 2010-10 | Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement More |
