DIN Standards Committee Optics and Precision Mechanics
Production equipment for microsystems - Method for measuring the shape of microlens arrays - Part 2: Double sided measurement of a microlens array
Abstract
This document specifies the procedure for the bilateral measurement of microlenses, microlens arrays and arrays of microlens arrays. The document specifies a geometric measurement method for the determination of position and geometry parameters of spherical and rotationally symmetric aspherical microlenses as well as position and geometry parameters of microlens arrays and arrays of microlens arrays by means of tactile and optical point measurements and optical area measurements. This document refers to double-sided microlens arrays in which microlens arrays are mounted on both sides of a common substrate. The arrays are arranged in such a way that two lenses are arranged opposite each other in pairs and form an optical imaging element.
Begin
2026-04-07
Planned document number
DIN 58557-2
Project number
02703435
