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NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

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Standards [CURRENT]

IEC 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 1: Begriffe

Edition 2005-09
Original language English , French
Price On Request
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Table of contents