NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Standards
[CURRENT]
IEC 62047-1
IEC 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Title (German)
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe