NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Standards [CURRENT]

IEC 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe

Edition 2016-01
Original language English , French
Price On Request
Table of contents