NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Standards [CURRENT]

DIN EN 60204-33 ; VDE 0113-33:2011-11
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified); German version EN 60204-33:2011

Title (German)

Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33: Anforderungen an Fertigungseinrichtungen für Halbleiter (IEC 60204-33:2009, modifiziert); Deutsche Fassung EN 60204-33:2011


This part of DIN EN 60204 (VDE 0113) applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. In this standard, the term "electrical" includes electrical, electronic, and programmable electronic matters (electrical equipment means electrical, electronic, and programmable electronic equipment). In the context of this standard, the term "person" refers to any individual and includes those persons who are assigned and instructed by the user or his agent(s) in the installation, use, and care of the fabrication equipment in question. The equipment covered by this standard commences at the point of connection of the supply to the electrical equipment of the machine and includes proper instruction for safe installation. The requirements for the electrical supply installation in buildings are contained in the DIN IEC 60364 (VDE 100) series. This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current and not exceeding 1 500 V for direct current, and with nominal supply frequencies not exceeding 200 Hz. For higher voltages and frequencies, special requirements may be needed. Supply voltage limits given in this standard apply for electrical equipment in which voltages are produced. Included are requirements for protective measures against electrical safety hazards as well as electrical interlock circuits that protect against non-electrical hazards. However, it does not cover all the requirements that are needed or required by other standards or regulations in order to safeguard persons from hazards other than electrical hazards (for example, chemical hazards, mechanical hazards, radiation hazards). Each type of machine has unique requirements to be accommodated to provide adequate safety. Additional and special requirements can apply to the electrical equipment of fabrication equipment that: - use, process, or produce potentially explosive material; - are used in potentially explosive and/or flammable atmospheres; - have special risks when producing or using certain materials; - are hoisting machines (which are covered by IEC 60204-32). This standard does not include requirements for possible effects on human health that can result from emissions (for example EMFs, noise) from the fabrication equipment. This standard does not contain requirements for electromagnetic compatibility (EMC). The responsible Committee is K 225 "Elektrotechnische Ausrüstung und Sicherheit von Maschinen und maschinellen Anlagen" ("Electrical equipment and safety of machines and mechanical equipment") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.

Document: references other documents

Document: referenced in other documents

Responsible national committee

DKE/K 225 - Elektronische Ausrüstung und Sicherheit von Maschinen und maschinellen Anlagen  

Edition 2011-11
Original language German
Price from 192.17 €
Table of contents


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