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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

About DKE Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Draft standard [Withdrawn]

DIN EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe (IEC 47F/177/CD:2013)

Document: referenced in other documents

Responsible national committee

DKE/K 631 - Halbleiterbauelemente

Edition 2014-05

Original language German , English

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Terminology

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

DIN EN 62047-1 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)

Document: referenced in other documents

Responsible national committee

Elena Rongen

DIN EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)