Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO/FDIS 14644-14:2025); German and English version prEN ISO 14644-14:2025
Abstract
This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644 1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644 1). NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required. The following items are not covered by this part of ISO 14644: — assessment of suitability with respect to biocontamination; — testing for suitability of decontamination agents and techniques; — cleanability of equipment and materials; — requirements on design of equipment and selection of materials; — physical properties of materials (e.g. electrostatic, thermal properties); — optimizing performance of equipment for specific process applications; — selection and use of statistical methods for testing; — protocols and requirements for local safety regulations.
Begin
2025-03-24
WI
00243045
Planned document number
DIN EN ISO 14644-14
Project number
04112228
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible european committee
CEN/TC 243 - Cleanroom technology
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments
draft standard
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO/FDIS 14644-14:2025); German and English version prEN ISO 14644-14:2025
2025-12
Order from DIN Media
