Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO/FDIS 14644-13:2025); German and English version prEN ISO 14644-13:2025
Abstract
This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels. The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10. The following matters of general guidance will be provided: — expected surface cleanliness levels; — suitability of cleaning methods; — compatibility of surfaces with the cleaning technique; — assessment of cleaning appropriateness. The following will be excluded from this document: — classification of cleaning methods; — product produced within a cleanroom; — specific surface-related cleaning methods; — detailed description of cleaning mechanisms, methods and procedures of various cleaning methods; — detailed material characteristics; — description of damage mechanisms by cleaning processes and time-dependent effects; — references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent; — other characteristics of particles such as electrostatic charge, ionic charges, etc.; — chemical reactions between molecular contaminants and surfaces; — microbiological aspects of surface cleanliness; — radioactive aspects of contamination; — health and safety considerations; — environmental aspects such as waste disposal, emissions, etc.; — selection and use of statistical methods.
Begin
2025-03-24
WI
00243043
Planned document number
DIN EN ISO 14644-13
Project number
04112227
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible european committee
CEN/TC 243 - Cleanroom technology
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments
draft standard
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO/FDIS 14644-13:2025); German and English version prEN ISO 14644-13:2025
2025-12
Order from DIN Media
